Scanning electron microscopy Springer-verlag berlin and heidelberg gmbh & co. kg (Springer-Verlag Berlin and Heidelberg GmbH & Co. KG)

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.